ION Beam Sputter Deposition Of Piezoelectric ALN Thin Films

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S. Saravanan
Dr. T. Sivakumar


The particle pillar sputtering process depends on the idea of particle strong communication. Contingent upon the episode energy, particles connect through Rutherford, feebly screened Coulomb and hard-circle collisions. The connection between the collision diameter and screening range is talked about for each situation. The development energy of Al-and AlN-slight movies in the structure of Dynamic Scaling Theory (DST) with the impact of receptive help of N+/N2 + particles. Both the movies, Al and AlN have become on Si(100) substrates for 3, 5, 8 and 15 minutes. Their surface morphologies were recorded utilizing AFM and dissected to decide the development governing peculiarity that appears at every affidavit time. The assimilation spectra were gathered in close to typical frequency math in diffuse reflectance mode. Variation of ingestion coefficient (α) with photon energy (hν) is introduced as a function of development temperature. A broad examination of micro structural variations, the development of normal crystallite size and AlN stage development as a function of temperature was completed utilizing X-ray diffraction (XRD), transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). Positron annihilation spectroscopy is utilized to examine the presence of deformities in film microstructure.

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Author Biographies

S. Saravanan

Assistant Professor And Head, Department Of Electronics And Communication, AJK College Of Arts And Science

Dr. T. Sivakumar

Principal, Department of Electronics, Rathnavel subramaniam College of Arts and science